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Products

TLRH Probe Station (MetScope)

The PL Optics TLRH MetScope Probe Station offers high-precision electrical characterization and metallurgical observation for semiconductor chips, ideal for R&D on small samples.

產(chǎn)品介紹

The probe station, also known as the probe test station, is primarily used to provide a testing platform for the electrical parameter testing of semiconductor chips. It can accommodate chips of various specifications and offers multiple adjustable test probes and probe holders. When paired with measuring instruments, it can perform parameter testing such as voltage, current, resistance, and capacitance-voltage characteristic curves for integrated circuits. It is suitable for research experiments and analysis of materials, chips, and other components, as well as for random testing.

The TLRH Series Precision Basic Probe Station (Metallurgical Version) is specifically designed by our company to meet the needs of academic research and industrial R&D. With its high-precision displacement control and excellent low leakage current performance, it has become an ideal solution for I–V characterization of multi-terminal devices, including field-effect transistors (FETs). Compared to the standard TLRH Precision Basic Probe Station, this metallurgical version features an upgraded microscope—from a stereo microscope to a metallurgical microscope with superior imaging performance—enabling easier observation and probing of smaller samples.

Technical Advantages:：

  • ● Modular design, allowing for the combination of different components to perform various tests.；

  • ● Maximum support for testing samples up to 12 inches in size；

  • ● The probe station has a displacement precision of up to 3μm, with a four-dimensional precision adjustment for the sample holder；

  • ● Compatible with various optical microscopes, and external optical paths can be used to perform photoelectric mapping tests；

  • ● Suitable for electrodes/PADs with sizes above 1μm；

  • ● Leakage current precision can reach 10pA/100fA (inside the shielding box)；

  • ● The probe seat uses imported crossed roller guides, offering linear motion with no backlash design；

  • ● The probe placement rack is wider, allowing for the accommodation of 6 DC probe seats and 4 RF probe seats；

  • ● Equipped with a two-dimensional precision adjustment function for the microscope, with various stroke and drive options available。

Detailed Module Configuration and Parameter Description:：

金相型精密探針臺(tái)詳情 - English.jpg

Model List：

Product ModelStage SizeStage Displacement AccuracyProbe holder Displacement AccuracyLeakage current accuracyNumber of Probe holder
TLRH-044 inches3μm3μm100fA3個(gè)
TLRH-066 inches3μm3μm100fA3個(gè)
TLRH-088 inches3μm3μm100fA3個(gè)
TLRH-1212 inches3μm3μm100fA3個(gè)

Experimental Accessories and Standard Testing Procedures：

Optical Isolation Platform (table surface > 600mm * 600mm), One computer (with standard VGA and USB interfaces), Keithley 2400 Digital SourceMeter (including software), etc.

During testing, connect the probe station and digital source meter. The probes are connected to the object under test. Use a microscope to observe and confirm that the two probes are in contact with the surface of the object under test. Once the connection is established, open the source meter software, select the appropriate parameters, and the I-V characteristic curve for the contact point can be obtained.

標(biāo)簽：

025-86550730