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Products

1?μm Probe Holder

PL Optics 1 μm Probe Holder delivers 13 mm XYZ travel, 1 μm positioning accuracy, 180 rotation and 60 tilt in manual or motorized versions for semiconductor testing.

產品介紹

As a core component of a probe station, the probe holder serves as the interface between the probe and the signal cable, providing electrical connectivity for semiconductor chip parameter testing.

Based on adjustment precision, probe holders can be categorized into 10?μm / 5?μm / 3?μm / 1?μm / 0.5?μm classes. According to operation mode, they are available in both manual and motorized versions. Additionally, depending on the application scenario, they can be further divided into standard probe holders, universal-angle (goniometric) probe holders, and L-shaped probe holders. These are widely used in electrical parameter testing in the semiconductor and optoelectronics industries.

The standard probe holder features a general-purpose probe clamp design, making it suitable for a wide range of standardized testing tasks. It is especially recommended when the sample electrodes are arranged in a regular layout and no special angular adjustment is required during probing.

Technical Advantages::

  • Main body made of imported aerospace-grade aluminum with sandblasted anodized surface, offering excellent mechanical performance

  • Equipped with imported crossed roller guide rails for ultra-high stability

  • Driven by imported high-resolution micrometer head to enhance overall positioning accuracy

  • Multifunctional adjustment clamp supports 180° rotation and 60° directional tilt

  • Designed for directional probe adjustment under a microscope without obstructing the field of view

  • Equipped with a high-strength adjustable magnetic base with magnetic holding force up to 10?kg, ensuring probe stability

Detailed Module Configuration and Parameter Description:

1μm探針座詳情頁 - English.jpg

Technical Specifications

ParameterSpecification
Probe Travel RangeXYZ axes: 13?mm each; 180° rotation; precise 60° angular tilt
Overall Dimensions300?mm × 65?mm × 142?mm (L × W × H)
Probe Positioning Accuracy1?μm
Leakage Current Accuracy10?pA @ coaxial cable; 100?fA @ imported triaxial cable
Optional ConnectorsCoaxial (BNC, alligator clips, banana plugs) / Imported triaxial cable (triax port)
Measurement RangeCurrent: 10?pA / 100?fA ~ 10?A; Voltage: up to 1000?V

Model List:

ModelAdjustment PrecisionCable TypeLeakage Current  Accuracy
TPLS01-UP1μmCoaxial cable
(optional BNC / alligator clip / banana plug)
10pA
TPLS01H-UP1μmTriaxial cable100fA

Application Areas:

Suitable for RF MeasurementsI/O Point TestingDC TestingWafer TestingResistance & Voltage TestingSolar Cell Testing Photocurrent TestingSemiconductor Device Analysis & Testing


標簽:

025-86550730